壁面剪应力测量底层隔板数学模型研究

摘要

为指导器件研发设计和测量工作，提出了一种建立底层隔板壁面剪应力一压差数学模型的方法。通过量纲分析确定壁面剪应力和压差之间关系；结合具体器件，采用CFD方法计算出若干组壁面剪应力、压差的值；通过非线性回归获得该器件的壁面剪应力一压差数学模型。将建立的模型与实测数据进行对比，结果表明：二者能够较好地吻合，证明提出的方法是有效的。并应用该方法设计并加工了一种压阻式微机电系统（MEMS）底层隔板。%A method to establish the wall shear stress-pressure mathematical model of sub-layer fence is pro- posed for the R ~ D and measurement work of the device. The relationship between wall shear stress and the pressure is determined by dimensional analysis. Combined with a specific device, the values of several sets of wall shear stress and the pressure are calculated by CFD method. The mathematical model is established by nonlinear regression using the aforementioned wall shear stress and pressure value. The method is verified through comparing the established model with the experimental data of a developed device. The result shows good match between them. The method proposed is effective. A piezoresistive MEMS sub-layer fence is de- signed and fabricated based on the method.