磁控溅射制备Er3+/Yb3+共掺杂TiO2薄膜的上转换发光特性

摘要

The Er3+/Yb3+ codoped TiO2 films prepared by magnetron sputtering can emit the green light at 490 nm and the red light at 670 nm by using a 980 nm diode laser irradiation. The emission intensity of upconversion is influenced by ErxYb2-xTi2O7 crystal and concentration of Er3+/Yb3+. The experiment shows that an appropriate codoping proportion of Er3+/Yb3+ brings a notable enhancement of upconversion luminescence intensity. Er3+ plays a main role in the upconversion luminescence, and the sensitized ion Yb3+can greatly improve the efficiency of upconversion. The TiO2 film prepared by magnetron sputtering has a small density of phonon states, thus it inhibits the process of non-radiative transitions, which leads to the formation of green light at 490 nm and the intensity of red light being greater than green light.%采用射频磁控溅射法制备得到Er3+/Yb3+共掺杂TiO2薄膜，在980 nm的抽运源作用下上转换可以得到490 nm的绿光和670 nm的红光。上转换红、绿光发光强度受到烧绿石ErxYb2-xTi2O7晶体的生成以及Er3+/Yb3+掺杂浓度的影响。实验表明，适量共掺杂Er3+/Yb3+可明显增强上转换发光。 Er3+在上转换发光中起主要作用，而引入敏化离子Yb3+可以大大提高上转换发光效率。磁控溅射法制备的TiO2薄膜声子态密度较小，从而抑制了无辐射跃迁过程，导致490 nm绿光形成以及红光强度大于绿光强度。