压电式高频振动台的研制

摘要

According to the research status and application requirements for high frequency vibration standard at home and abroad, a new piezoelectric high frequency vibrator is developed. The high frequency range is from 2kHz to 50kHz. The maximum peak value of amplitude is 500nm. Optimum design of high frequency vibrator is described. Some important problems concerning the design of it are analyzed and reviewed. The issues discussed include functional description and choice of components of piezoelectric vibrator, optimization performance parameter of the piezoelectric stack, effects of contacting interfaces on the performances, and choice and effect of pre-stress of bolt in the vibrator. The main technical specifications of the high frequency vibrator and the results of comparison experiment are given.%根据高频振动基准装置的研究现状和应用需求,研究了压电式高频振动台的优化设计方案,并对压电式高频振动台在设计中的几个重要问题:高频台各组成部分的功能及选择、压电叠堆设计参数的优化、接触界面对振动台性能的影响与预应力的选择及影响等进行了分析.研制了新型压电式高频振动台,其工作频率为2 ～ 50 kHz,最大振幅500 nm.给出了新型压电式高频振动台的主要技术指标和比对实验数据.