傅里叶变换轮廓术测量方法的分析研究

摘要

对传统傅里叶变换轮廓术(FTP)、π相移法以及灰度图法测量结果进行对比分析.结果证明,随着被测物体高度梯度的增加,基于灰度图和π相移技术的改进傅里叶变换轮廓术取得了很好效果,特别是在梯度大于3的情况下适合采用π相移法,能更有效地提高傅里叶变换轮廓术的测量精度.%The traditional Fourier transform profilometry (FTP) and two improved Fourier transform profilometry (respectively called the π phase shift method and the gray image method) were analyzed,and the comparative study of this three different methods of measurement range was carried out.Experimental results show that two kinds of improved Fourier transform profilometry measurement range are significantly greater than that of the traditional one.It' s proved that measurement result of the π phase shift method is better than that of the gray image method as the object height gradient increases,measurement result of the π phase shift method is better than that of the gray image method.