影响激光驱动器注入镜组特性的误差因素分析

摘要

研究了惯性约束大功率激光聚变驱动器注入镜组特性影响因素，分析表明透镜的几何尺寸公差、透镜装配公差和镜组在线安装公差等因素对镜组焦距公差、焦斑分布、波像差方面的特性影响较大。针对影响镜组特性的主要因素，建立了镜组特性影响分析的相关数学模型，并基于MatIab和Zemax软件平台对模型进行模拟计算，结果表明数学模型可以保证镜组特性需要的制造、安装公差。%During the study Of aII kinds Of tOIerance infIuencing factOrs On the perfOrmance Of injectiOn cOmpOund Iens made Of high pOwer Iaser inertiaI cOnfinement fusiOn drive,anaIysis shOws that geOmetry dimensiOn tOIerance Of the Iens,Iens assembIy tOIerance and cOmpOund Iens have a significant effect On the perfOmance Of cOmpOund Iens fOcaI Iength tOIerance, fOcaI spOt pOsitiOn and wave aberratiOn. AccOrding tO the main infIuencing factOrs,reIated perfOrmance mathematicaI mOdeIs are set up. The mOdeIs are simuIated and the resuIts Of simuIatiOn are anaIyzed based On the sOftware pIatfOrm Of MatIab and Zemax. The manufacturing and instaIIatiOn tOIerance ensuring the perfOrmance are aIsO determined based On the simuIatiOn resuIts and tOIerance Of cOmpOund Iens.