快速热平衡式pVTt法气体流量标准装置的设计与研究

摘要

设计了基于单侧溢流式恒温水浴系统的快速热平衡式pVTt气体流量标准装置,对水浴及临界流喷嘴进行了实验研究,采用了五路阀门组合控制技术,实现了预抽气功能,降低了压力波动.装置平衡时间为6 min,与其它pVTt法气体流量标准装置相比,平衡时间至少缩短一倍.%Based on unilateral overflow fast thermal equilibrium constant temperature water bath system,pVTt gas flow standard device is designed,and water bath and critical flow nozzle experiments are made.Using the five-way valve combination control technology,air exhaust before functions can be achieved,the pressure fluctuations is reduced.The device balance rime is 6 min.Comparing with other pVTt gas flow standard device,the balance time can be shorten at least in half.