Digital Readout System for Micromachined Gyroscope and Analysis for its Demodulation Algorithm

摘要

A new digital readout system for micromachined gyroscope has been proposed to implement flexible parameter adiustment,improve the control performance of gyroscope,and make error compensation.By digitalizing the output of the gyroscope,this system uses a floatingtype digital signal processor(DSP)to process the signal demodulation and achieve the feedback conffol of the gyroscope.Therefore.the small change of capacitance in the micromachined gyroscope Can be detected.A new demodulation algorithm of least mean square demodulation(LMSD)has been developed inside DSP Simulation and measurement results show that LMSD Can improve 29%of the noise performance compared with the typical multiplication method.In air pressure.a kind ofvibration-wheel micmmachined over the 100-Hz bandwidth by using this digital readout technology.