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Phononic Crystal Waveguiding in GaAs.

机译:GaAs中的声子晶体波导。

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摘要

Compared to the much more common photonic crystals that are used to manipulate light, phononic crystals (PnCs) with inclusions in a lattice can be used to manipulate sound. While trying to propagate in a periodically structured media, acoustic waves may experience geometries in which propagation forward is totally forbidden. Furthermore, defects in the periodicity can be used to confine acoustic waves to follow complicated routes on a wavelength scale. Using advanced fabrication methods, we aim to implement these structures to control surface acoustic wave (SAW) propagation on the piezoelectric surface and eventually interact SAWs with quantum structures.;To investigate the interaction of SAWs with periodic elastic structures, SAW interdigital transducers (IDTs) and PnC fabrication procedures were developed. GaAs is chosen as a piezoelectric substrate for SAWs propagation. Lift-off photolithography processes were used to fabricate IDTs with finger widths as low as 1.5 microns.;PnCs are periodic structures of shallow air holes created in GaAs substrate by means of a wet-etching process. The PnCs are square lattices with lattice constants of 8 and 4 microns. To predict the behavior of a SAW when interacting with the PnC structures, an FDTD simulator was used to calculate the band structures and SAW wave displacement on the crystal surface. The bandgap (BG) predicted for the 8 micron crystal ranges from 180 MHz to 220 MHz. Simulations show a shift in the BG position for 4 microns crystals ranging from 391 to 439 MHz.;Two main waveguide geometries were considered in this work: a simple line waveguide and a funneling entrance line waveguide. Simulations indicated an increase in acoustic power density for the funneling waveguides. Fabricated device evaluated with electrical measurements. In addition, a scanning Sagnac interferometer is used to map the energy density of the SAWs. The Sagnac interferometer is designed to measure the outward displacement of a surface due to the SAW. Interferometric measurements confirmed waveguiding in the modified funnel entrance waveguide embedded in the 4 microns PnC. However, they also revealed strong dissipation of the SAW in the waveguide due to the non-vertical sidewalls resulting from the wet-etch process.
机译:与用于操纵光的更常见的光子晶体相比,可以使用晶格中包含夹杂物的声子晶体(PnCs)来操纵声音。当试图在周期性结构化的介质中传播时,声波可能会遇到完全禁止向前传播的几何形状。此外,周期性的缺陷可用于将声波限制为在波长范围内遵循复杂的路径。我们使用先进的制造方法来实现这些结构,以控制声表面波(SAW)在压电表面上的传播并最终使SAW与量子结构相互作用。;要研究SAW与周期弹性结构的相互作用,请使用SAW叉指换能器(IDT)并开发了PnC制造程序。 GaAs被选作SAW传播的压电衬底。剥离光刻工艺用于制造手指宽度低至1.5微米的IDT。PnC是通过湿蚀刻工艺在GaAs衬底中形成的浅气孔的周期性结构。 PnC是具有8和4微米的晶格常数的正方形晶格。为了预测SAW与PnC结构相互作用时的行为,使用FDTD模拟器计算晶体表面的能带结构和SAW波位移。预测的8微米晶体的带隙(BG)为180 MHz至220 MHz。仿真显示,对于4微米晶体,从391 MHz到439 MHz,BG位置发生了变化。在这项工作中考虑了两个主要的波导几何形状:简单的线波导和漏斗形的入口线波导。模拟表明漏斗形波导的声功率密度增加。用电气测量评估制造的设备。此外,使用扫描Sagnac干涉仪来绘制声表面波的能量密度。 Sagnac干涉仪设计用于测量由于声表面波引起的表面向外位移。干涉测量法证实了嵌入4微米PnC的改进漏斗入口波导中的波导。然而,由于湿蚀刻工艺产生的非垂直侧壁,它们还显示出SAW在波导中的强烈耗散。

著录项

  • 作者

    Azodi Aval, Golnaz.;

  • 作者单位

    Queen's University (Canada).;

  • 授予单位 Queen's University (Canada).;
  • 学科 Physics Condensed Matter.
  • 学位 M.S.
  • 年度 2014
  • 页码 100 p.
  • 总页数 100
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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