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Interlayer utilization (including metal borides) for subsequent deposition of NSD films via microwave plasma CVD on 316 and 440C stainless steels.

机译:层间利用率(包括金属硼化物),用于随后通过微波等离子体CVD在316和440C不锈钢上沉积NSD膜。

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摘要

Diamond thin films have promising applications in numerous fields due to the extreme properties of diamonds in conjunction with the surface enhancement of thin films. Biomedical applications are numerous including temporary implants and various dental and surgical instruments. The unique combination of properties offered by nanostructured diamond films that make it such an attractive surface coating include extreme hardness, low obtainable surface roughness, excellent thermal conductivity, and chemical inertness. Regrettably, numerous problems exist when attempting to coat stainless steel with diamond generating a readily delaminated film: outward diffusion of iron to the surface, inward diffusion of carbon limiting necessary surface carbon precursor, and the mismatch between the coefficients of thermal expansion yielding substantial residual stress. While some exotic methods have been attempted to overcome these hindrances, the most common approach is the use of an intermediate layer between the stainless steel substrate and the diamond thin film.;In this research, both 316 stainless steel disks and 440C stainless steel ball bearings were tested with interlayers including discrete coatings and graded, diffusion-based surface enhancements. Titanium nitride and thermochemical diffusion boride interlayers were both examined for their effectiveness at allowing for the growth of continuous and adherent diamond films. Titanium nitride interlayers were deposited by cathodic arc vacuum deposition on 440C bearings. Lower temperature diamond processing resulted in improved surface coverage after cooling, but ultimately, both continuity and adhesion of the nanostructured diamond films were unacceptable. The ability to grow quality diamond films on TiN interlayers is in agreement with previous work on iron and low alloy steel substrates, and the similarly seen inadequate adhesion strength is partially a consequence of the lacking establishment of an interfacial carbide phase.;Surface boriding was implemented using the novel method of microwave plasma CVD with a mixture of hydrogen and diborane gases. On 440C bearings, dual phase boride layers of Fe2B and FeB were formed which supported adhered nanostructured diamond films. Continuity of the films was not seamless with limited regions remaining uncoated potentially corresponding to delamination of the film as evidenced by the presence of tubular structures presumably composed of sp2 bonded carbon. Surface boriding of 316 stainless steel discs was conducted at various powers and pressures to achieve temperatures ranging from 550-800 °C. The substrate boriding temperature was found to substantially influence the resultant interlayer by altering the metal boride(s) present. The lowest temperatures produced an interlayer where CrB was the single detected phase, higher temperatures yielded the presence of only Fe2B, and a combination of the two phases resulted from an intermediate boriding temperature. Compared with the more common, commercialized boriding methods, this a profound result given the problems posed by the FeB phase in addition to other advantages offered by CVD processes and microwave generated plasmas in general. Indentation testing of the boride layers revealed excellent adhesion strength for all borided interlayers, and above all, no evidence of cracking was observed for a sole Fe2B phase. As with boriding of 440C bearings, subsequent diamond deposition was achieved on these interlayers with substantially improved adhesion strength relative to diamond coated TiN interlayers. Both XRD and Raman spectroscopy confirmed a nanostructured diamond film with interfacial chromium carbides responsible for enhanced adhesion strength. Interlayers consisting solely of Fe2B have displayed an ability to support fully continuous nanostructured diamond films, yet additional study is required for consistent reproduction. This is in good agreement with initial work on pack borided high alloy steels to promote diamond film surface modification. The future direction for continued research of nanostructured diamond coatings on microwave plasma CVD borided stainless steel should further investigate the adhesion of both borided interlayers and subsequent NSD films in addition to short, interrupted diamond depositions to study the interlayer/diamond film interface.
机译:由于金刚石的极高性能以及薄膜的表面增强作用,金刚石薄膜在许多领域都具有广阔的应用前景。生物医学的应用非常广泛,包括临时植入物以及各种牙科和手术器械。纳米结构的金刚石膜所提供的独特性能组合使之成为极具吸引力的表面涂层,包括极高的硬度,低可获得的表面粗糙度,出色的导热性和化学惰性。遗憾的是,当尝试用金刚石涂覆不锈钢以产生易于分层的膜时,存在许多问题:铁向表面的向外扩散,碳向内的扩散限制了必要的表面碳前体,以及热膨胀系数之间的不匹配而产生了巨大的残余应力。 。尽管已经尝试了一些特殊的方法来克服这些障碍,但最常见的方法是在不锈钢基底和金刚石薄膜之间使用中间层。在本研究中,同时使用316不锈钢圆盘和440C不锈钢球轴承用包括离散涂层和渐变的,基于扩散的表面增强层的中间层进行了测试。都检查了氮化钛和热化学扩散硼化物夹层在允许连续和附着的金刚石膜生长方面的有效性。通过阴极电弧真空沉积在440C轴承上沉积氮化钛中间层。较低温度的金刚石加工导致冷却后改善的表面覆盖率,但是最终,纳米结构金刚石膜的连续性和粘附性都是不可接受的。在TiN中间层上生长优质金刚石薄膜的能力与先前在铁和低合金钢基底上的工作相符,并且类似地看到的粘合强度不足部分是由于缺乏界面碳化物相建立的结果。;实施了表面渗硼使用氢气和乙硼烷气体混合物的微波等离子体CVD新方法。在440C轴承上,形成了Fe2B和FeB的双相硼化物层,支撑着粘附的纳米结构金刚石膜。膜的连续性不是无缝的,有限的区域仍未涂覆,可能对应于膜的分层,这由可能由sp2键合的碳组成的管状结构的存在所证明。在各种功率和压力下对316不锈钢圆盘进行表面硼化处理,以达到550-800°C的温度范围。发现通过改变存在的金属硼化物,衬底的硼化物温度基本上影响所得的中间层。最低温度产生夹层,其中CrB是检测到的单一相,较高的温度仅产生Fe2B的存在,而中间硼化温度导致了两相的结合。与更常见的商业化硼化方法相比,考虑到FeB相所带来的问题以及CVD工艺和微波产生的等离子体所带来的其他优势,这是一个深刻的结果。硼化物层的压痕测试表明,所有硼化中间层均具有出色的粘合强度,最重要的是,没有观察到唯一的Fe2B相出现开裂的迹象。与440C轴承的渗碳一样,相对于金刚石涂覆的TiN中间层,在这些中间层上实现了后续的金刚石沉积,并具有显着提高的粘合强度。 XRD和拉曼光谱均证实了具有界面碳化铬的纳米结构金刚石膜,该膜负责增强粘合强度。仅由Fe2B组成的中间层已显示出能够支持完全连续的纳米结构金刚石薄膜的能力,但要进行一致的复制还需要进行额外的研究。这与为提高金刚石薄膜表面改性而对渗硼高合金钢进行的最初工作非常吻合。继续研究微波等离子体CVD硼化不锈钢上的纳米结构金刚石涂层的未来方向,除了短期的,间断的金刚石沉积以外,还应该进一步研究硼化中间层和后续NSD膜的粘附性,以研究层间/金刚石膜界面。

著录项

  • 作者

    Ballinger, Jared.;

  • 作者单位

    The University of Alabama at Birmingham.;

  • 授予单位 The University of Alabama at Birmingham.;
  • 学科 Materials science.;Physics.
  • 学位 Ph.D.
  • 年度 2015
  • 页码 147 p.
  • 总页数 147
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

  • 入库时间 2022-08-17 11:53:04

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