首页> 外文学位 >RESISTANCE BEHAVIOR OF ZINC-SULFIDE, ALUMINUM-NITRIDE, SILICON-CARBIDE AND POLYMETHYL METHACRYLATE UNDER ULTRAHIGH PRESSURE.
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RESISTANCE BEHAVIOR OF ZINC-SULFIDE, ALUMINUM-NITRIDE, SILICON-CARBIDE AND POLYMETHYL METHACRYLATE UNDER ULTRAHIGH PRESSURE.

机译:超高压下硫化锌,氮化铝,碳化硅和甲基丙烯酸甲酯的电阻行为。

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摘要

The single crystal diamond spherically-tipped indentor-flat anvil ultrahigh pressure generating systems was used to seek to observe insulator-to-metal transitions in ZnS, AlN, SiC and PMMA. ZnS was studied by a new non-shorting electrical resistance monitoring technique using the interdigitated electrodes. A metallic transition was observed at 14.0 (+OR-) 0.6 GPa, very close to existing reported values and thus demonstrating the feasibility of the new technique. Interdigitated electrodes with finger widths and spacings (both of d) of 12.5 (mu)m, 6 (mu)m and 3 (mu)m were used in the ZnS work. Electrodes with d = 0.5 (mu)m fabricated by electron beam lithography using PMMA as resist were used to seek to observe the metallic transition in AlN, theoretically predicted at 90 Gpa. Premature cracking of the r.f. reactive sputter deposited, brittle AlN films under moderate pressure broke the electrodes thus preventing meaningful resistance measurements at higher pressure. However, the coated method where thin metal films were deposited on both the indentor and the flat anvil to act as electrodes produced evidence that AlN remained insulating up to at least 59 GPa. Studies on detached thin films of SiC in the multilayer configuration with the coated method indicated that SiC remained an excellent insulator up to a least 72 GPa. Studies at higher pressures were prohibited by the fracture of the brittle film resulting in electrical shorts. Interdigitated electrodes with a d = 1.25 (mu)m were also used in the SiC work. This indicated that SiC was insulating up to at least 63 GPa. Pressurization of PMMA showed that PMMA remained highly insulating up to 100 GPa.
机译:使用单晶金刚石球形尖端压头-平砧超高压生成系统来观察ZnS,AlN,SiC和PMMA中绝缘体到金属的过渡。通过使用叉指电极的新型非短路电阻监测技术研究了ZnS。在14.0(+ OR-)0.6 GPa处观察到金属转变,非常接近现有报道的值,因此证明了新技术的可行性。指状电极的宽度和间距(均为d)分别为12.5μm,6μm和3μm的叉指电极在ZnS工作中使用。使用PMMA作为抗蚀剂通过电子束光刻制造的d =0.5μm的电极被用于观察AlN中的金属转变,理论上预测为90Gpa。射频过早破裂在中等压力下,反应性溅射沉积的脆性AlN膜会破坏电极,从而阻止在较高压力下进行有意义的电阻测量。但是,在压头和平坦的砧座上都沉积有薄金属膜作为电极的涂覆方法产生的证据表明,AlN的绝缘性至少达到59 GPa。用涂覆方法对多层结构的SiC分离薄膜的研究表明,SiC保持了至少72 GPa的优良绝缘性能。脆性薄膜的断裂导致电气短路,禁止在更高的压力下进行研究。 d =1.25μm的叉指电极也用于SiC工作中。这表明SiC至少绝缘了63 GPa。对PMMA加压表明,PMMA保持高达100 GPa的高度绝缘。

著录项

  • 作者

    CHAN, KAM-SHUI.;

  • 作者单位

    Cornell University.;

  • 授予单位 Cornell University.;
  • 学科 Physics Condensed Matter.
  • 学位 Ph.D.
  • 年度 1981
  • 页码 111 p.
  • 总页数 111
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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