Transmission electron microscopy characterization of semiconductors grown by organometallic vapor phase epitaxy.

摘要

Microstructural analysis by transmission electron microscopy has been investigated in this dissertation. Phenomena such as spinodal decomposition and ordering in III/V alloys grown by organometallic vapor phase epitaxy have been the particular topics. No direct evidence of spinodal decomposition was observed in high quality as-grown GaAs;Long range ordered structures were observed for the first time in GaAs;For a Ga;The first L1;The first observation of L1;The two variants of the CuPt type ordered structure were also observed in InP