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Gallium arsenide/aluminum(x)-gallium(1-x)arsenide quantum well lasers grown on gallium arsenide and silicon by molecular beam epitaxy.

机译:砷化镓/铝(x)-砷化镓(1-x)量子阱激光器通过分子束外延生长在砷化镓和硅上。

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摘要

The thesis begins with an introduction, in Chapter 1, to activities in molecular beam epitaxy (MBE) and related crystal growth methods as well as their applications in the field of optical interconnects using low-threshold lasers and high-speed photodetectors.; In Chapter 2, a Green's function of interface matching problems is presented. A very simple equation can be derived, which can provide some support to a very controversial, yet highly successful and very popular quantum dipole model for Schottky barriers and heterojunctions by J. Tersoff. A simplified model can be obtained, which eliminates the uncertainties in Tersoff's scheme and predicts very well the band offsets for several important semiconductor heterosystems including GaAs/AlAs.; Chapter 3 deals with details of MBE growth of GaAs/AlGaAs quantum well laser material on GaAs substrates. Various growth techniques and substrate orientations are discussed. The dependence of threshold current density of a GaAs/AlGaAs GRINSCH laser on quantum well thickness is experimentally studied. The experimental results are in good agreement with a qualitative analysis. A theoretical discussion of the effect of quantum well thickness on the threshold current density is used to explain the experimental results. Furthermore, this study has achieved for the first time, threshold current densities below 100 A/cm{dollar}sp2{dollar} in any semiconductor laser.; Chapter 4 presents some important issues in GaAs-on-Si research. Both the potentialities and limitations of GaAs-on-Si technology are discussed. The main advantage of GaAs-on-Si technology is the special features of Si substrates not available in GaAs substrates.; Chapter 5 discusses the experimental aspects of GaAs-on-Si laser growth by MBE. The formation and prevention of antiphase domains (APDs) are discussed. Various methods to reduce defect density are presented.; Appendix I summarizes the operation and maintenance of a Riber 2300 MBE system from a practical point of view. Only several components in this MBE system are absolutely needed to grow high quality materials. It also discusses the routine material calibrations performed. Appendix II, III, IV, V, and VI deal with the details of material processing and device fabrication. (Abstract shortened with permission of author.)
机译:本文从第一章开始介绍分子束外延(MBE)的活动和相关的晶体生长方法,以及它们在使用低阈值激光和高速光电探测器的光学互连领域中的应用。在第二章中,介绍了格林的接口匹配问题函数。可以推导出一个非常简单的方程式,它可以为J. Tersoff的肖特基势垒和异质结的一个极具争议性,但非常成功且非常流行的量子偶极子模型提供一些支持。可以获得简化的模型,该模型消除了Tersoff方案的不确定性,并很好地预测了包括GaAs / AlAs在内的几个重要半导体异质系统的带隙。第三章详细介绍了GaAs / AlGaAs量子阱激光材料在GaAs衬底上的MBE生长。讨论了各种生长技术和衬底方向。实验研究了GaAs / AlGaAs GRINSCH激光器的阈值电流密度与量子阱厚度的关系。实验结果与定性分析吻合良好。关于量子阱厚度对阈值电流密度的影响的理论讨论用于解释实验结果。此外,这项研究首次在任何半导体激光器中实现了低于100 A / cm {sp2 {dollar}的阈值电流密度。第4章介绍了GaAs-on-Si研究中的一些重要问题。讨论了GaAs-on-Si技术的潜力和局限性。 GaAs-on-Si技术的主要优点是GaAs衬底中没有的Si衬底的特殊功能。第5章讨论了MBE生长的GaAs-on-Si激光器的实验方面。讨论了反相域(APD)的形成和预防。提出了多种降低缺陷密度的方法。附录I从实际的角度总结了Riber 2300 MBE系统的操作和维护。 MBE系统中仅需要几个组件即可生长高质量的材料。它还讨论了执行的常规材料校准。附录II,III,IV,V和VI讨论了材料处理和器件制造的细节。 (摘要经作者许可缩短。)

著录项

  • 作者

    Chen, Howard ZeHua.;

  • 作者单位

    California Institute of Technology.;

  • 授予单位 California Institute of Technology.;
  • 学科 Physics Electricity and Magnetism.; Physics Condensed Matter.
  • 学位 Ph.D.
  • 年度 1990
  • 页码 141 p.
  • 总页数 141
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 电磁学、电动力学;
  • 关键词

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