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Predicting the spatial output field of a laser beam in a thermally self-induced inhomogeneous medium.

机译:预测热自感应不均匀介质中激光束的空间输出场。

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摘要

Laser beam propagation in a thermally self-induced inhomogeneous medium is investigated to find the transient spatial output field for an arbitrary incident field. The paraxial wave equation is coupled with the heat diffusion equation to predict the beam output field as the index of refraction transiently changes due to absorption of light by the medium. The coupled equations are nondimensionalized and are explicitly expressed in full nonlinear form. Limits for the validity of using the coupled wave-diffusion approach are given, with respect to bulk fluid motion and the transverse wave assumption. An explicit, finite-difference method (FDM) for solving the heat diffusion equation is coupled with an implicit FDM solution of the paraxial wave equation. The reasons for choosing these schemes are presented, along with a mixed-mode parallelization method in which OpenMP is used for the explicit solver, and MPI for the implicit solver. Convergence, stability, and code performance is presented. Numerical results are then compared to exact solutions and experiments for Gaussian and multi-mode laser beams, which verify that this approach is accurate in the range of validity, and describes local, transient self-focusing in multi-mode beams. This model is then further developed to show the importance of considering the nonlinear laser-material interaction when describing laser-assisted chemical etching (LACE). The exponential relationship between LACE rates and surface temperature means that very small changes in laser beam intensity field, and thus surface temperature distribution, has a very large effect on the etch profile. Numerical calculations of LACE microfabrication of borosilicate glass in a sulfur hexafluoride process gas with a 10.6 micron wavelength laser beam are given. These results show how the surface morphology of the glass wafer is changed by the inhomogeneous laser beam interaction with the process gas.
机译:研究了激光在热自感应非均匀介质中的传播,以找到任意入射场的瞬态空间输出场。近轴波方程与热扩散方程耦合在一起,以预测由于介质吸收光而使折射率瞬时变化时光束的输出场。耦合方程是无量纲的,并以完全非线性的形式明确表示。相对于整体流体运动和横波假设,给出了使用耦合波扩散方法的有效性限制。求解热扩散方程的显式有限差分方法(FDM)与近轴波方程的隐式FDM解决方案结合在一起。介绍了选择这些方案的原因,以及混合模式并行化方法,其中OpenMP用于显式求解器,MPI用于隐式求解器。展示了收敛性,稳定性和代码性能。然后将数值结果与高斯和多模激光束的精确解和实验进行比较,这证明了该方法在有效范围内是准确的,并描述了多模束的局部瞬态自聚焦。然后进一步开发该模型,以显示在描述激光辅助化学蚀刻(LACE)时考虑非线性激光与材料相互作用的重要性。 LACE速率与表面温度之间的指数关系意味着激光束强度场的很小变化,因此表面温度分布对蚀刻轮廓有很大影响。给出了在六氟化硫工艺气体中使用波长为10.6微米的激光束对硼硅酸盐玻璃进行LACE微细加工的数值计算。这些结果表明玻璃晶片的表面形态如何通过与工艺气体的不均匀激光束相互作用而改变。

著录项

  • 作者单位

    University of Illinois at Urbana-Champaign.;

  • 授予单位 University of Illinois at Urbana-Champaign.;
  • 学科 Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2002
  • 页码 136 p.
  • 总页数 136
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械、仪表工业;
  • 关键词

  • 入库时间 2022-08-17 11:46:32

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