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Fabrication of macroelectronics by letterpress printing and guidelines for printable structures.

机译:通过凸版印刷和可印刷结构指南制造宏电子学。

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Electronics fabricated on ultra-large scales and in high volumes, will require novel approaches to pattern formation. Substituting photolithography with printing for patterning these devices is particularly interesting because of the potential to increase production speed and decrease cost by eliminating many process steps-without changing the overall fabrication schemes. Printing will also improve the capability to produce electronics on flexible and curved surfaces.; This dissertation introduces a letterpress printing technology to directly print etch masks for macroelectronics fabrication. In this process, a stamp with raised features transfers a polymer melt film onto the workpiece, where it serves as a mask for wet or dry etching. Using such printed polymer masks, the patterning of materials with feature sizes relevant to macroelectronics is demonstrated. The compatibility of this process with electronics fabrication is demonstrated, by producing amorphous silicon thin film transistors using letterpress printed etch masks. Replacing photolithography does not degrade the transistor performance.; Nonuniform etch mask profiles are created by viscous fingering during the printing process. These can be smoothed by heating, which allows capillary forces to drive polymer spreading. In doing this, however, the footprint of the microstructures can be distorted by spreading along the solid surface. Such spreading can limit the resolution of printed features.; Modeling and numerical simulation of the capillary spreading phenomenon shows the effect of feature size, geometry, and ink properties. This allows prediction of the effect of spreading on printing resolution and pattern fidelity. Simulation of various geometries—including infinite and finite lines, intersections, and other shapes relevant to macroelectronics fabrication—demonstrates the effect of patterns on spreading. From such simulations it is possible to predict the amount of distortion that will occur within a given time. A method for generating design rules from these simulations is presented, and examples are given. The model is extended to include effects of homogeneous solidification, which can be used to arrest the spreading and maintain pattern fidelity and resolution. The model's description is general and applies to a number of printing technologies that utilize Newtonian fluid inks, for which pattern distortion is driven by capillary spreading.
机译:以超大规模大规模生产的电子产品将需要新颖的图案形成方法。用光刻代替印刷术来对这些器件进行构图特别有趣,因为它有可能通过消除许多工艺步骤来提高生产速度并降低成本,而无需更改整体制造方案。印刷还将提高在柔性和弯曲表面上生产电子产品的能力。本文介绍了一种凸版印刷技术,以直接印刷用于大型电子制造的蚀刻掩模。在此过程中,具有凸起特征的压模将聚合物熔体膜转移到工件上,在此处用作湿法或干法蚀刻的掩模。使用这种印刷的聚合物掩膜,展示了具有与宏电子学相关的特征尺寸的材料的图案化。通过使用凸版印刷蚀刻掩模生产非晶硅薄膜晶体管,证明了该工艺与电子制造的兼容性。替换光刻不会降低晶体管的性能。在打印过程中通过粘性指法产生不均匀的蚀刻掩模轮廓。这些可以通过加热而平滑,这允许毛细管力驱动聚合物扩散。然而,这样做时,微结构的覆盖区可通过沿固体表面扩展而变形。这种扩展会限制打印特征的分辨率。毛细管扩散现象的建模和数值模拟显示了特征尺寸,几何形状和油墨特性的影响。这可以预测扩展对打印分辨率和图案逼真度的影响。对各种几何形状(包括无限和有限的线,交点以及与宏电子制造相关的其他形状)的仿真证明了图案对扩散的影响。通过这种模拟,可以预测在给定时间内将发生的失真量。提出了一种从这些仿真生成设计规则的方法,并给出了示例。该模型已扩展为包括均匀凝固的影响,可用于阻止扩散并保持图案的保真度和分辨率。该模型的描述是一般性的,适用于许多利用牛顿流体墨水的印刷技术,这些技术的图案变形是由毛细管扩散引起的。

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