development of plasma fluid models in COMSOL and Matlab.

摘要

Plasma fluid modeling has been vital in furthering academic and industrial understanding of plasma characteristics. Fluid models allow researchers to self-consistently quantify spatial and temporal characteristics of the plasma, such as electron temperature. Chemical kinetics along with surface interactions play key roles in determining the chemical make-up of a plasma and is easily integrated into the models. The validity of these models come into question partially from the techniques used to solve them but more importantly come from the innate assumptions associated with the governing equations derived.;In this thesis, three generic fluid models have been developed and derived from first principles. The three models are entitled the ambipolar model, classical model, and revised-classical model. The fluid models are developed in COMSOL® / Matlab®. Two of the three fluid models are implemented onto the mGEC reactor and on an electron beam system. A comparison between models is achieved for both systems.