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Novel nanostructured thin film heterostructures: Growth, nanoscale characterization and properties.

机译:新型纳米结构薄膜异质结构:生长,纳米级表征和性能。

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摘要

During my graduate study, I have been involved in the growth of new nano heterostructures grown by Pulsed Laser Deposition and by Laser MBE with the emphasis on understanding the thin film growth process by a new paradigm of Domain Matching Epitaxy (DME) and to integrate them on substrates like silicon, sapphire and new metallic substrates like Ni with exciting technological applications.; The DME involves matching of integral multiples of lattice planes (diffracting as well as nondiffracting) between the film and the substrate, and this matching could be different in different directions. The idea of matching planes is derived from the basic fact that during thin film growth lattice relaxation involves generation of dislocations whose Burgers vectors correspond to missing or extra planes, rather than lattice constants. In the DME framework, the conventional lattice matching epitaxy (LME) becomes a special case where matching of lattice constants results from matching of lattice planes with a relatively small misfit of less than 7-8%. In large lattice mismatch systems, epitaxial growth of thin films is possible by matching of domains where integral multiples of lattice planes match across the interface.; The work done in my doctoral study is divided into two main segments, (a) Growth of layered nanostructures and (b) growth of nanostructured composite thin films. The three systems studied under the first segment are (1) Growth of epitaxial self-aligned insulating films on metals (Cu) and its integration with Si (100). (2) Growth and integration of LSMO with Si (100). (3) Growth of Si on Ni substrates (highly textured) with TiN as a buffer layer. The heterostructures studied under the second part are (1) Role of Self-assembled Gold Nanodots in Improving the Electrical and Optical Characteristics of Zinc Oxide Films and (2) Growth of high quality epitaxial ZnO-Pt Nanocomposite and ZnO/Pt, Nanolayer Structures on Sapphire (0001).; The epitaxial growth of these heterostructures was carried out by Pulsed laser deposition and laser MBE. The epitaxial relationships are given in each case are shown to be due to domain matching epitaxy. X-Ray diffraction and Transmission Electron Microscopy studies confirm the relationship between film and substrate. Also, electrical and optical measurements were done, in order to study the change in these properties.
机译:在我的研究生学习期间,我参与了通过脉冲激光沉积和Laser MBE生长的新纳米异质结构的生长,重点是通过域匹配外延(DME)的新范式了解薄膜生长过程并将其整合具有令人兴奋的技术应用的硅,蓝宝石和镍等新型金属衬底。 DME涉及在薄膜和基板之间匹配晶格平面的整数倍(衍射和非衍射),并且这种匹配在不同方向上可能不同。平面匹配的思想源于以下基本事实:在薄膜生长期间,晶格弛豫涉及位错的产生,其Burgers矢量对应于缺失或多余的平面,而不是晶格常数。在DME框架中,常规晶格匹配外延(LME)成为一种特殊情况,其中晶格常数的匹配是由晶格平面的匹配导致的,其相对较小的失配小于7-8%。在大型晶格失配系统中,可以通过匹配晶格平面的整数倍在整个界面上匹配的畴来匹配薄膜的外延生长。我在博士研究中所做的工作分为两个主要部分:(a)层状纳米结构的生长和(b)纳米结构复合薄膜的生长。在第一部分中研究的三个系统是(1)在金属(Cu)上生长外延自对准绝缘膜及其与Si的集成(100)。 (2)LSMO与Si(100)的生长和整合。 (3)在以TiN为缓冲层的Ni衬底(高度织构)上生长Si。第二部分研究的异质结构是(1)自组装金纳米点在改善氧化锌薄膜的电学和光学特性方面的作用,以及(2)高质量外延生长的ZnO-Pt纳米复合材料和ZnO / Pt纳米结构蓝宝石(0001)。这些异质结构的外延生长是通过脉冲激光沉积和激光MBE进行的。给出的外延关系在每种情况下都显示是由于域匹配外延引起的。 X射线衍射和透射电子显微镜研究证实了薄膜与基材之间的关系。另外,进行了电学和光学测量,以研究这些特性的变化。

著录项

  • 作者

    Chugh, Amit.;

  • 作者单位

    North Carolina State University.;

  • 授予单位 North Carolina State University.;
  • 学科 Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2005
  • 页码 227 p.
  • 总页数 227
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

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