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Self-assembled monolayers as capping agents and as a tunable resist for site-selective electrodeposition of patterned structures.

机译:自组装单分子层用作封盖剂和可调整的抗蚀剂,用于图案结构的位置选择性电沉积。

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Several challenges need to be overcome in order to implement nanotechnology into existing devices or to fabricate novel devices. This thesis provides mechanistic details to understand some of the challenges and also provides new potential techniques to overcome certain issues.; To exploit the size dependent properties of nanoparticles, it is essential to control the particle size. It is shown that injection of octanethiol into suspensions of ZnO particles can be used to quench particle growth. X-ray photoelectron spectroscopy studies of the adsorption of octanethiol on ZnO single crystals indicate relatively weak adsorption of thiolate and sulfonate species dependent on the crystal orientation. These results suggest that adsorption of thiolate and sulfonate groups on ZnO particles in suspension prevent dissolution of the solid phase. Furthermore, the octanethiol is adsorbed sufficiently strongly to quench growth but can be easily removed for subsequent surface functionalization.; The shape of the absorbance edge for a suspension of semiconductor quantum particles is influenced both by the electronic transition and the distribution of band gaps in the system. Using a suitable model to relate the absorption energy to the particle radius, we demonstrate this relationship by inferring the particle size distribution from the absorbance spectrum of a suspension of ZnO quantum particles, and comparing it to the distribution obtained from transmission electron microscope images. This analysis is broadly applicable to quantum particle suspensions of many of the II--VI or III--V compound semiconductors.; A patterned self-assembled monolayer of octadecanethiol (ODT) on a gold or silver substrate is used as a tunable resist for the patterned electrodeposition of different metals on an electrode. Firstly, the electrodeposited metallic features have lateral dimensions that are dictated by the SAM with aspect ratios that are determined by charge conservation. Secondly, it is demonstrated that a patterned SAM of alkanethiol on Ag or Au surfaces can act as either a positive or negative resist by tuning the overpotential. A phase diagram showing the different regimes for silver deposition as a function of the surfactant chainlength and deposition potential is provided. Finally, the ability of creating Ag features by electroless deposition of silver using the surfactant as a catalyst is demonstrated. The ability to make micro- and nano-meter, complex, multicomponent features by electrodeposition and electroless deposition is shown with potential application in the fabrication of interconnects, GMRs and MTJs. (Abstract shortened by UMI.)
机译:为了将纳米技术应用于现有设备或制造新颖的设备,需要克服几个挑战。本文提供了机制细节来理解一些挑战,并提供了克服某些问题的新的潜在技术。为了利用纳米颗粒的尺寸依赖性,必须控制颗粒尺寸。结果表明,将辛硫醇注射到ZnO颗粒的悬浮液中可用于淬灭颗粒的生长。辛硫醇在ZnO单晶上的X射线光电子能谱研究表明,取决于晶体取向的硫醇盐和磺酸盐物质的吸附相对较弱。这些结果表明,悬浮液中ZnO颗粒上硫醇盐和磺酸盐基团的吸附可防止固相溶解。此外,辛硫醇被足够强地吸附以抑制生长,但是可以容易地除去以用于随后的表面官能化。半导体量子粒子的悬浮液的吸收边缘的形状既受电子跃迁的影响,又受系统中带隙分布的影响。使用合适的模型将吸收能量与粒子半径相关联,我们通过从ZnO量子粒子的悬浮液的吸收光谱中推断出粒径分布,并将其与从透射电子显微镜图像中获得的分布进行比较,证明了这种关系。这种分析广泛适用于许多II-VI或III-V化合物半导体的量子粒子悬浮液。金或银基材上的十八烷硫醇(ODT)的图案化自组装单分子层用作可调谐抗蚀剂,用于电极上不同金属的图案化电沉积。首先,电沉积的金属特征具有由SAM决定的横向尺寸,其纵横比由电荷守恒确定。其次,证明了通过调节过电势,在Ag或Au表面上构图的链烷硫醇SAM可以用作正或负抗蚀剂。提供了相图,示出了根据表面活性剂链长和沉积电势的不同的银沉积方式。最后,证明了使用表面活性剂作为催化剂通过银的化学沉积产生Ag特征的能力。通过电沉积和化学沉积来制造微米和纳米,复杂,多组分特征的能力已显示出潜在的用途,可用于互连,GMR和MTJ的制造。 (摘要由UMI缩短。)

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