Characterization of Dielectric Films for Electrowetting on Dielectric Systems.

摘要

Electrowetting is a phenomenon that controls the wettability of liquids on solid surfaces by the application of electric potential. It is an interesting method to handle tiny amounts of liquid on solid surfaces. In recent times, researchers have been investigating this phenomenon and have reported some unexplained behavior and degradation in the Electrowetting system performance. Electrowetting systems include the presence of electric field and different materials from metals to dielectrics and electrolytes that create an environment in which corrosion processes play a very important role. With the small dimensions of the electrodes, corrosion can cause failure quickly when the dielectric fails.;In this work, commonly used dielectric films such as silicon dioxide and silicon nitride were deposited using Plasma Enhanced Chemical Vapor Deposition and characterized on the basis of thickness uniformity, etch rate measurements, Dry current -- voltage measurements and Wet current -- voltage measurements. Sputtered silicon dioxide films were also characterized using the same methods. The correlation between Dry I -- V and Wet I -- V measurements was studied and a comparison of dielectric quality of films based on these measurements is presented. Also, impact of different liquids on the dielectric quality of films was studied.