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Extreme service packaging for silicon carbide electronic devices.

机译:碳化硅电子设备的极限服务包装。

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摘要

Electronic devices based on silicon carbide (SiC) represent a good choice for a variety of new high temperature, high power electronic applications. Moreover, SiC ceramics have great potentials for use in harsh environments. Nevertheless, many technical challenges still need to be addressed, including high temperature stability. Results obtained on several levels in the development of a SiC-based package are presented.; The sealing of ceramic packages is generally accomplished using specialty glasses. Several commercial glasses were tested in view of their application as glass sealants. The reactions between SiC and certain oxides present in the glasses were responsible for the formation of CO gas. Selection criteria were developed based on thermodynamic calculations. This approach provides valuable information in tailoring suitable glasses.; The oxidation of SiC in air results in the formation of silica that does not prove to be protective above about 1800 K because of interfacial reactions with its SiC substrate. The oxidation of both single crystal and polycrystalline SiC, between 973 and 2053 K, resulted in the formation of quartz, cristobalite or tridymite, which are the stable crystalline polymorphs of silica at ambient pressure. The polymorphs were pure SiO2, and contamination of the oxide scales from the oxidizing environment did not occur. The only variable affecting the occurrence of a specific polymorph was the oxidation temperature. Cristobalite was formed at temperatures ≥ 1673 K, tridymite between 1073 and 1573 K, while quartz formed at 973 K. Cristobalite was observed to grow in a spherulitic fashion from amorphous silica. This was not the case for tridymite and quartz, which appeared to grow as oriented crystalline films. The presence of a thin layer of silicon oxycarbide was detected at the SiC/SiO 2 interface.; Formation of reliable and homogeneous interconnects can be a critical issue for demanding applications. The approach that was undertaken to interconnect nickel leads to the device is that of the transient liquid phase bonding, where a bond is formed at the tungsten metal interface through isothermal solidification of a copper interlayer. The refractory metal and nickel contact wire alloy with the interlayer to produce a strong, electrically conductive bond.
机译:基于碳化硅(SiC)的电子设备是各种新型高温,高功率电子应用的理想选择。此外,SiC陶瓷具有在恶劣环境中使用的巨大潜力。然而,仍然需要解决许多技术挑战,包括高温稳定性。介绍了在SiC基封装的开发中在几个层面上获得的结果。陶瓷包装的密封通常使用特种玻璃完成。考虑到它们作为玻璃密封剂的应用,对几种商用玻璃进行了测试。 SiC与玻璃中某些氧化物之间的反应是导致CO气体形成的原因。选择标准是根据热力学计算得出的。这种方法为定制合适的眼镜提供了有价值的信息。空气中SiC的氧化会导致形成二氧化硅,该二氧化硅由于与SiC衬底的界面反应而在约1800 K以上的温度下不能起到保护作用。在973至2053 K之间,单晶SiC和多晶SiC的氧化均导致石英,方石英或鳞石英的形成,它们是二氧化硅在环境压力下的稳定结晶多晶型物。多晶型物是纯SiO 2,并且没有发生氧化环境的氧化皮污染。影响特定多晶型物发生的唯一变量是氧化温度。方石英在≥1673 K的温度下形成,鳞石英在1073至1573 K之间,而石英在973 K形成。观察到方石英由无定形二氧化硅以球状生长。鳞石英和石英却并非如此,它们似乎以定向晶体膜的形式生长。在SiC / SiO 2界面处检测到薄层的碳氧化硅。对于要求苛刻的应用,可靠且均匀的互连的形成可能是一个关键问题。将镍互连到器件的方法是瞬态液相键合,其中通过铜中间层的等温固化在钨金属界面形成键。难熔金属和镍与中间层的接触线合金可产生牢固的导电结合。

著录项

  • 作者单位

    Washington State University.;

  • 授予单位 Washington State University.;
  • 学科 Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2006
  • 页码 256 p.
  • 总页数 256
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

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