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Mechanics of wire saw machining process: Experimental analyses and modeling.

机译:线锯加工过程的力学:实验分析和建模。

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摘要

Wire saw process is widely used to slice many ceramic crystals that are utilized in a wide range of engineering applications ranging from silicon wafers in microelectronics and photovoltaic industries to piezo-crystals for actuators and sonar detectors. The process has a higher yield, lower kerf loss and lower surface damage with respect to inner diameter saw. The wire saw process allows higher diameter and thinner wafer cutting. The process is also used in cutting almost all brittle materials including; ultra-hard carbides, high density or foam ceramics, glasses, sapphire and rocks. Wire saw process represents 30% of the total silicon wafer production cost which directly affects the industry. There is a need to optimize the process by developing models relating process parameters to the out puts.;In this work, we have conducted parametric experimental study on a model wire saw to correlate the process parameters to quality of the machined surface. An automated single wire machine that can allow the variation of the down feed speed, wire speed and wire tension is utilized. Detailed analysis of the cut surface topology is carried out using surface profilomtry and SEM imaging. The detailed parametric study is rationalized in several models that describe the relation between the process parameters and the process induced surface damage. The developed correlation is used to explore the limits of the design space and aid in planning and optimization of the process performance.
机译:线锯工艺被广泛用于对许多陶瓷晶体进行切片,这些陶瓷晶体被广泛用于各种工程应用,从微电子和光伏行业的硅晶片到致动器和声纳检测器的压电晶体。相对于内径锯,该方法具有较高的产率,较低的切缝损失和较低的表面损伤。线锯工艺可实现更大的直径和更薄的晶圆切割。该工艺还用于切割几乎所有脆性材料,包括;超硬碳化物,高密度或泡沫陶瓷,玻璃,蓝宝石和岩石。线锯工艺占硅晶片总生产成本的30%,这直接影响到该行业。有必要通过开发将过程参数与输出相关联的模型来优化过程。在这项工作中,我们对模型线锯进行了参数化实验研究,以将过程参数与机加工表面的质量相关联。利用可以改变下降速度,线速度和线张力的自动单线机。切割表面拓扑的详细分析使用表面轮廓和SEM成像进行。详细的参数研究在几个模型中得到了合理化,这些模型描述了过程参数与过程引起的表面损伤之间的关系。所建立的相关性用于探索设计空间的限制,并有助于规划和优化过程性能。

著录项

  • 作者

    Teomete, Egemen.;

  • 作者单位

    Iowa State University.;

  • 授予单位 Iowa State University.;
  • 学科 Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2008
  • 页码 137 p.
  • 总页数 137
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械、仪表工业;
  • 关键词

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