声明
Abstract
摘要
CONTENTS
List of figures
List of tables
List of symbols and abbreviations
1 Introduction
1.1 Electrospray ionization (ESI)
1.1.1 Mechanism of the ESI
1.1.2 The fundamental process of ion formation
1.1.3 Electric current carried by the jet stream
1.2 Nanoelectrospray ionization (nano-ESI)
1.2.1 Nano-ESI operation
1.2.2 Application area
1.3 Electrospray emitters
1.3.1 Glass and fused silica emitters
1.3.2 Micromachined polymer electrospray emitters
1.3.3 Micromachined silicon-based electrospray emitters
1.3.4 Emitters for pico-ESI and controlled sample deposition
1.4 Mass spectrometry
1.4.1 Overview of mass spectrometry
1.4.2 Miniaturization of mass spectrometry
1.4.3 Limitations in ESI-MS
1.5 Ion transmission in ESI-MS
1.5.1 Electrostatic focusing
1.5.2 Electrodynamic focusing
1.5.3 Aerodynamic focusing
1.6 Research objectives
1.7 Thesis organization and overview
2 Microfabrication of a multilayer SU-8 focusing electrode
2.1 Introduction
2.2 Design and simulation
2.3 Fabrication
2.4 Results and discussion
2.4.1 The shape of the multilayer SU-8 structure
2.4.2 Cracks removal
2.4.3 Device evaluation
2.5 Summary
3 Design,simulation,and fabrication of a MEMS-based air amplifier
3.1 Introduction
3.2 Design
3.3 Simulation
3.3.1 2D air amplifier simulation
3.3.2 3D air amplifier simulation
3.4 Fabrication
3.4.1 SU-8 mold micromachining
3.4.2 PDMS molding process
3.4.3 Glass-PDMS bonding
3.5 Experiment setup
3.6 Results and Discussion
3.6.1 Probe position and the nitrogen pressure
3.6.2 ES emitter offset
3.6.3 Sample solution flow rate
3.7 Design and fabrication of pico-ESI
3.7.1 Introduction
3.7.2 Silicon-based out-of-plane emitter array
3.7.3 Polymer-based in-plane emitter array
3.8 Summary
4 Design,simulation and evaluation of improved air amplifier incorporating an ion funnel for nano-ESI MS
4.1 Introduction
4.2 Experimental section
4.2.1 Device structure and fabrication
4.2.2 Materials
4.2.3 Mass spectrometer and data acquisition
4.2.4 Experimental Setup
4.3 Numerical simulations
4.3.1 CFD
4.3.2 DC and RF electric fields
4.3.3 Collision model
4.4 Results and discussion
4.4.1 Computer simulations
4.4.2 Experiments with DC-only potentials applied to the ion funnel
4.4.3 Experiments wim DC and RF potentials applied to the ion funnel
4.5 Summary
5 Design,optimization and numerical simulation of a second prototype of the air amplifier
5.1 Introduction
5.2 Computational methods
5.2.1 Flow field calculation
5.2.2 Electric field calculation
5.2.3 Ion trajectory calculations
5.3 Results and discussion
5.3.1 Computational model
5.3.2 Taguchi design of experiment optimization
5.3.3 CFD calculations
5.3.4 Electric potential calculations
5.3.5 Ion trajectory calculations
5.4 Experimental
5.4.1 Device structure and fabrication
5.4.2 Preliminary experimental measurements of the pressure profiles
5.5 Summary
6 Conclusions and recommendations for future work
Abstract of Innovation Points
References
Appendix
Published Academic Papers during PhD Period
Acknowledgements
About the Author