Review of characterization of ZnO by Spectroscopic Ellipsometry

摘要

Spectroscopic Ellipsometric (SE) is a non contact, non destructive optical characterization technique which allows the precise determination of the refractive indices and thicknesses of thin films. Very sensitive to any optical contrast, SE. is now also being applied to the characterization of organic materials such OLED or for a range of Solar Cells that require thin films; all parameters (complex refractive index and thickness) of each layer can be obtained from one single measurement.rnIn this paper we will focus on the determination of the thickness and refractive index of ZnO. We will also demonstrate how a SE measurement in different spectral range can give access to different properties of the ZnO & TCO's layers such as electrical properties (resistivity, resistance) or doping differentiation. We will introduce the SE measurement of encapsulated sample through the back side of the substrate and the extration film's resistivity.