首页> 外文会议>World Tribology Congress III 2005 vol.2 >SURFACE TEXTURES FOR ENHANCED LUBRICATION: FABRICATION AND CHARACTERIZATION TECHNIQUES
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SURFACE TEXTURES FOR ENHANCED LUBRICATION: FABRICATION AND CHARACTERIZATION TECHNIQUES

机译:增强润滑的表面纹理:制造和表征技术

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摘要

In hydrodynamic lubricated thrust load bearing contacts, commonly found in mechanical seals and bearings, 'engineered' surface textures have the potential to enhance lubrication in terms of reduction in friction, leakage and increasing load support. These surface textures or features are in the form of micron scaled posts or cavities having arbitrarily definable geometries. The height/depth of these features is of the same order of magnitude as the film thickness of the lubricated contact. This paper presents an overview of a photolithographic process for fabricating the deterministic asperities on a 'flat' stainless steel surface. The textured surface is then characterized using an optical profiler to evaluate the surface form error and edge rounding error in surface texture features. It was found that the circumferential waviness of the substrate was sinusoidal with amplitude of 0.2μm. When the micro features are lapped for height control, slight rounding around the edges of the features having an average radius of about 10% of asperity length is observed.
机译:在通常在机械密封件和轴承中发现的流体动力推力载荷轴承接触件中,“工程化”的表面纹理在减少摩擦,泄漏和增加载荷支持方面具有增强润滑的潜力。这些表面纹理或特征为具有任意可定义的几何形状的微米级柱或空腔的形式。这些特征的高度/深度与润滑触点的膜厚度相同数量级。本文概述了用于在“平坦”不锈钢表面上制造确定性凹凸的光刻工艺。然后使用光学轮廓仪对纹理化的表面进行特征化,以评估表面纹理特征中的表面形状误差和边缘倒圆误差。发现基板的圆周波纹为正弦波,振幅为0.2μm。当对微特征进行研磨以控制高度时,观察到特征边缘的轻微变圆,其平均半径约为粗糙长度的10%。

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