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History of magnetorheological finishing

机译:磁流变整理的历史

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Magnetorheological finishing (MRF) is a deterministic method for producing complex optics with figure accuracy <50 nm and surface roughness <1 nm. MRF was invented at the Luikov Institute of Heat and Mass Transfer in Minsk, Belarus in the late 1980s by a team led by William Kordonski. When the Soviet Union opened up, New York businessman Lowell Mintz was invited to Minsk in 1990 to explore possibilities for technology transfer. Mintz was told of the potential for MRF, but did not understand whether it had value. Mintz was referred to Harvey Pollicove at the Center for Optics Manufacturing of the University of Rochester. As a result of their conversation, they sent Prof. Steve Jacobs to visit Minsk and evaluate MRF. From Jacobs' positive findings, and with support from Lowell Mintz, Kordonski and his colleagues were invited in 1993 to work at the Center for Optics Manufacturing with Jacobs and Don Golini to refine MRF technology. A "preprototype" finishing machine was operating by 1994. Prof. Greg Forbes and doctoral student Paul Dumas developed algorithms for deterministic control of MRF. In 1996, Golini recognized the commercial potential of MRF, secured investment capital from Lowell Mintz, and founded QED Technologies. The first commercial MRF machine was unveiled in 1998. It was followed by more advanced models and by groundbreaking subaperture stitching interferometers for metrology. In 2006, QED was acquired by and became a division of Cabot Microelectronics. This paper recounts the history of the development of MRF and the founding of QED Technologies.
机译:磁流变精加工(MRF)是生产图形精度<50 nm和表面粗糙度<1 nm的复杂光学器件的确定性方法。 MRF是由威廉·科登斯基(William Kordonski)领导的团队在1980年代末期在白俄罗斯明斯克的卢伊科夫传热传质研究所发明的。苏联开放时,1990年,纽约商人洛厄尔·明茨(Lowell Mintz)应邀来到明斯克,探索技术转让的可能性。 Mintz被告知MRF的潜力,但不知道它是否有价值。 Mintz在罗切斯特大学的光学制造中心被转介给Harvey Pollicove。谈话的结果是,他们派出史蒂夫·雅各布斯教授访问明斯克并评估了MRF。根据Jacobs的积极发现,并在Lowell Mintz的支持下,Kordonski及其同事于1993年受邀与Jacobs和Don Golini一起在光学制造中心工作,以完善MRF技术。 1994年,一台“原型”精加工机投入运行。GregForbes教授和博士生Paul Dumas开发了用于MRF确定性控制的算法。 1996年,Golini意识到了MRF的商业潜力,从Lowell Mintz获得了投资资金,并创立了QED Technologies。第一台商用MRF机器于1998年问世。随后是更先进的型号和开创性的用于测量的亚孔径缝合干涉仪。 2006年,QED被Cabot Microelectronics收购并成为其子公司。本文讲述了MRF的发展历史和QED Technologies的成立。

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