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Adaptive control of ion beams produced by ultrafast laser ablation of silicon

机译:硅超快激光烧蚀产生的离子束的自适应控制

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In a context where ultrafast lasers have become ideal tools for material probing and processing we present various concepts for process control and optimization. Temporal tailoring of ultrashort laser pulses enables synergies between radiation and material and, therefore, new opportunities for optimal processing of materials. The concept of optimizing laser interactions is based on the possibility to adjust energy delivery so that control of laser-induced processes can be achieved and particular states of matter can be accessed. We present recent results related to the implementation of adaptive feedback loops based on temporal shaping of ultrafast laser pulses to control laser-induced phenomena for practical applications. The chosen example indicates the possibility to manipulate the kinetic properties of ions emitted from ultrafast laser irradiated semiconducting samples, using excitation sequences synchronized with the phase-transformation characteristic times. Versatile sub-keV ion beams are obtained exploiting transitions to supercritical fluid states with minimal energetic expenses, while achieving very efficient energy coupling and thermodynamic paths towards highly volatile states. Temporally selective irradiation can thus open up efficient thermodynamic paths towards critical points, delivering at the same time an extended degree of control in material processing.
机译:在超快激光器已经成为材料探测和加工的理想工具的背景下,我们提出了各种过程控制和优化的概念。超短激光脉冲的时间调整可实现辐射与材料之间的协同作用,因此可为材料的最佳加工提供新的机会。优化激光相互作用的概念是基于调整能量输送的可能性,从而可以实现对激光诱导过程的控制,并可以访问特定的物质状态。我们目前的最新成果与基于超快激光脉冲的时间整形的自适应反馈回路的实现有关,以控制实际应用中的激光诱导现象。所选示例表明了使用与相变特征时间同步的激发序列来控制从超快激光辐照半导体样品发射的离子动力学特性的可能性。通过以最小的能量消耗转变到超临界流体状态而获得多功能的亚keV离子束,同时实现了非常高效的能量耦合和向高挥发性状态的热力学路径。因此,暂时的选择性照射可以打开通往临界点的有效热力学路径,同时在材料加工中提供扩展的控制程度。

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