DESIGN AND FABRICATION OF A MULTIFUNCTIONAL SCANNING PROBE WITH INTEGRATED TIP CHANGER FOR FULLY AUTOMATED NANOFABRICATION

摘要

A novel system for automated exchange of multiple probe tip tools for nanoscale fabrication, metrology, and characterization has been presented. An active cantilever probe with a thermally actuated microgripper is used to sense and secure tool tips. The probe is compatible with commercially available AFM systems. A working prototype of the active cantilever is currently being fabricated and tested.