PRECISION MEASUREMENT OF MOTION ACCURACY FOR DEVELOPMENT OF MICRO MEASUREMENT CENTER

摘要

We propose a new measurement method of evaluating the parallelism between spindle axis (C-axis) and stage axis (z-axis) for producing MMC system. Preliminarily experiment was performed and the results show that accurate evaluation of motion is possible. A new contact probe was developed for trial. The contact detection experiments show the less than 50 nm contact detection.