HIGH-SCAN RATE POSITIONER FOR SCANNED PROBE MICROSCOPY

摘要

The prototype presented herein demonstrated a novel 2 DOF resonance scanner. The mechanical flexure design allowed the 2 DOF to be essentially decoupled from each other. The actuator design illustrated the capability of utilizing only one magnet to provide forces in 2 DOF. Commensurate with the flexure design, the actuator permitsrnlow power consumption required to drive each axis. Resonant control of the x-axis was shown to be feasible. Capacitance probes demonstrated low noise characteristics while permitting high-bandwidth control. Bandwidth and noise however, are limited overall by the dSPACE data acquisition system bandwidth and resolution.rnTo address these issues, we have been developing an FPGA-based control solution which will use 24-bit analog-to-digital converters. The highspeed data acquisition will be implemented on a high-speed FPGA system with control loops running at their required loop rates [4]. Although challenging areas of investigation remain, this initial study demonstrates a feasible baseline for continuing development.