DESIGN OF A MINIATURE DUAL-PURPOSE POSITIONER-FIXTURE FOR SIX-AXIS SCANNING AND DETACHABLE FIXTURING IN NANO-INSTRUMENTATION

摘要

The purpose of this paper is to demonstrate a detachable fixture system that can provide, (1) positioning with sub-micron repeatability and accuracy and (2) rapid (100 Hz) scanning. Such systems may be used in nano-instrumentation (e.g. SEM, STM, AFM) and nanomanufacturing equipment to repeatably fixture, accurately position in a quasi-static mode, and/or execute fast scanning motions. This device is called a dual-purpose fixture-positioner (DPF) due to its ability to perform as a fixture and positioner.