OPTICAL MEASURING DEVICE FOR RADIAL ERROR OF MICRO-SPINDLE USING HIGH-SPEED PHOTO-AMPLIFIERS

摘要

The results obtained in this paper are summarized as follows.rn1. It became clear that the radial error motions of a micro-spindle running at the maximum rotational speed of 200 krpm can be measured by the optical measurement method using a small steel ball, which is based on a laser collimator.rn2. The radial error motion of the micro-spindle running at ultra-high speed tends to become smoother with the increase in rotational speed.rn3. The TIR of the micro-spindle drastically increases as spindle speed increases.rn4. There is a need to verify the validity of the measurement results in future work.