DESIGN AND EVALUATION OF A PROTOTYPE INSTRUMENT FOR MEASURING ROUNDNESS PROFILES OF MICRO SHAFTS

摘要

This paper describes the design and evaluation of the axis-of-rotation for a new instrument suitable for measuring the form, waviness and roughness of axially symmetric micro components. The current non-contact metrology instruments with nanometer resolution are only suitable for flat surfaces, while this new instrument will achieve comparable measurements on axially-symmetric micro components. The first experiments performed on our prototype demonstrate that the instrumentrnis able to span a revolved surface with a resolution ranging from 0.15 to 4 nm, depending on the diameter of the sample. The suitability of the selected traction drive system for the rotary axis of motion is confirmed. Further investigations will focus on characterizing the two nanopositioning stages that manipulate the micro component and the probe tip.