REAL TIME MEASUREMENT OF AXIAL FORCE AND TORQUE DURING POLISHING

摘要

From preliminary testing it appears that the presented polishing head design has the potential to be sufficiently sensitive and repeatable to provide useful quantitative process information. At present the system can clearly capture the changes in torque loading that accompany changes in the axial loading. Short term work is focusing on increased consistency in the mechanical setup and the reduction of system noise, more thorough signal analysis (i.e. FFT) and the addition of sensors to monitor process vibrations. We expect that reducing or accounting for these variations will result in a design that is sensitive to changes in numerous polishing parameters, that when coupled with material removal rates, surface finishes and subsurface damage will provide new information regarding polishing process fundamentals.