Golden Parameter Ratio Application in the WEB Recipe Development

摘要

This paper describes the implementation of the Golden Parameter Ratio (GPR) for the blanket Tungsten Etch Back (WEB) Process. GPR was used for the recipe improvements, which yielded throughput increase for specific chamber configuration. These tungsten etch back chambers were refurbished from Applied Materials P5000 oxide etch chambers. This paper describes a method used to optimize the above recipe. The most common method was to use the design of the experiment (DOE). Since there are at least 4 input factors like RF power, Pressure, SF_6 flow and Argon flow and three responses: Etch Rate, Etch Uniformity and Etch Pattern. To complete a full DOE, at least 64 tests runs are required for etch chamber. This work shows that by using Golden Parameter Ratio methods, an optimized recipe was developed for all three chambers by using less than ten tests runs.