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Bulk atomic and electronic structure properties of silicon nitride

机译:氮化硅的体原子和电子结构性质

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Silicon nitride (Si_3N_4) is an important material as insulating film in microelectronics devices as well as a high temperature structural ceramic. The electronic structure of the bulk Si_3N_4 and the defect in Si_3N_4 are of great importance. Recently, It is possible to predict the atomic and electronic structure and properties of materials quantitatively due to the development of the pseudopotential method based on the density functional theory (DFT). It should be noted that the atomic configuration of the bulk Si_3N_4 crystal is very complex with large number of atoms in the unit cell, and the precise configuration has not been settled. This problem is of great importance in order to study the amorphous Si_3N_4 used in the devices, because the local configurations around each Si and N atoms in Si_3N_4 crystal and amorphous form of SI_3N_4 are rather similar to each other, which determine the main feature of the electronic structure.
机译:氮化硅(Si_3N_4)是一种重要的材料,可作为微电子器件中的绝缘膜以及高温结构陶瓷。体Si_3N_4的电子结构和Si_3N_4中的缺陷非常重要。最近,由于基于密度泛函理论(DFT)的pseudo势方法的发展,有可能定量地预测材料的原子和电子结构及性质。应该注意的是,块状Si_3N_4晶体的原子构型非常复杂,在晶胞中有大量原子,并且尚未确定精确的构型。这个问题对于研究器件中使用的非晶Si_3N_4非常重要,因为Si_3N_4晶体中每个Si和N原子周围的局部构型与SI_3N_4的非晶形式非常相似,这决定了硅的主要特征。电子结构。

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