Micro-and nano-four-point probes for surface conductivity measurements

摘要

For measuring conductivity in microscopic reions on surfaces, we have developed micro-four-point probes in which probe spacings are from 2 to 80 #mu# m [1]. We have installed the probes on XYZ Microslide (omicron) for positioning in an UHV-SEM-MBE chamber, so that surface preparations with well-defined structures, observation of surface areas under measurements, and conductivity measurements can be carried out simultaneously. Using the probes of 8- #mu# m spacing, we have measured the conductivity of silicon surfaces at room temperature with various surface superstructures by Ag and Au adsorptions. The measurements leads the follwing two findings.