Nano-inkjet and Its Application to Metal-Induced Crystallization of a-Si for poy-Si TFTs

摘要

We have been developing inkjet nozzle, which is able to eject very fine droplets, aiming at applying it to fabrication of electronic components such as displays. The principle of droplet ejection relies on the electro-static drawing of liquid from apex of needle. When Si needle fabricated using MEMS technology is employed in the nozzle, pattering of dot whose diameter is a few hundred nm can be drawn (1-5). This suggests that the nozzle ejects droplets whose size is less than 100 nm. Therefore, we designated this technology as "nano-inkjet".