Application of nanostructured silicon to manufacturing of solar cells

摘要

In the paper the process of controlled formation of nanostructured silicon is demonstrated and the optical performance compared to standard and textured interfaces. The influence of the formation technique type on its structure, photo-luminescent and anti-reflecting properties is studied. The layers of nanostructured silicon have been formed on the textured surface of solar cells. It has been demonstrated that the use of nanostructured silicon reduces the anti-reflection coefficient significantly. It is also shown, that the formation of nanostructured silicon on a textured substrate of single-crystal silicon after formation on them of contact systems results in decrease of consecutive resistance, increase of short circuit current, decrease of shunting resistance and increase of efficiency.