Low-Temperature Synthesis and Gas Sensing Properties of Anatase TiO_2 Thin Films

摘要

Crystalline anatase TiO_2 thin films were obtained on glass substrates at 60℃, 75℃ and 90℃, respectively, by liquid phase deposition (LPD) method without subsequent heat treatment. X-ray diffraction (XRD), atomic force microscopy (AFM) and UV-Vis spectrophotometer were used to characterize the as-synthesized TiO_2 thin films. The H_2 sensing properties of the TiO_2 thin films based sensors were investigated. The results show that the gas sensors signal Ra/Rg (Ra: resistance in air, Rg: resistance in a sample gas) decreases with the increasing deposition temperature. The TiO_2 thin films obtained at deposition temperature of 60℃ exhibited the maximum H_2 gas response at 350℃, and the magnitude of the sensor signal and the response time for 500ppm H_2 was 1.25 and 17s, respectively.