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Wear and adhesion optimization of thin TiAlN films by structure design

机译:通过结构设计优化TiAlN薄膜的磨损和附着力

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摘要

The structure of TiAlN and other thin films depends on the coating method, parameter variation and an eventual treatment of the coating after deposition. Concerning the coating process, reactive sputter and evaporation parameters influence structure formation as well as plasma driven chemical reaction on the substrate surface. Besides, crystal formation and agglomeration depends on energetic level and flow rates in the coating system, the kind and number of reactive partners, temperature and specific parameters of the coating plant. Post-deposition treatments on the other hand may influence the formation of residual stresses but not the crystallization of different phases within the complete coating. Besides, mechanical treatment may change the coating's morphology which may be important depending on the application since sometimes a columnar structure is to be optimized in size, amount and location. Thus a homogeneous coating is not always the optimum solution. In the experiments presented here we investigated the wear properties of thin TiAIN films. They were post-treated by sandblasting and heating in order to reduce frictional forces between the contacting bodies or analyze the effects of elevated temperatures respectively. These wear properties were evaluated by turning of 42CrMo4V at low cutting speed.
机译:TiAlN和其他薄膜的结构取决于涂层方法,参数变化以及沉积后涂层的最终处理。关于涂覆过程,反应性溅射和蒸发参数会影响结构的形成以及基材表面上等离子驱动的化学反应。此外,晶体的形成和附聚还取决于涂料系统中的能级和流速,反应伙伴的种类和数量,涂料厂的温度和具体参数。另一方面,沉积后处理可能会影响残余应力的形成,但不会影响整个涂层内不同相的结晶。此外,机械处理可以改变涂层的形态,这可能取决于应用而重要,因为有时要在尺寸,数量和位置上优化柱状结构。因此,均匀的涂层并不总是最佳的解决方案。在此处介绍的实验中,我们研究了TiAIN薄膜的磨损性能。它们经过喷砂和加热后处理,以减少接触体之间的摩擦力或分别分析高温的影响。通过在低切削速度下车削42CrMo4V来评估这些磨损性能。

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