Highly Oriented NiTiCu Shape Memory Thin Films Grown by Molecular Beam Epitaxy

摘要

We present a study demonstrating the capability for controlled shape memory thin film growth using molecular beam epitaxy. Here, NiTiCu alloy films were grown which are known to exhibit the martensitic transformation well above room temperature. Remarkably, the microstruc-ture of these films was found to be very different compared to conventionally sputtered polycrys-talline films: here, the crystallites are highly oriented within +-3°along the film plane normal. Moreover, a splitting of the martensite orientation is detected indicating the selection of only two specific martensite variants. Mechanical stress measurements reveal a high ratio of recoverable stress even for films below 500 nm thickness. These results open up the possibility for tailoring microstructure and crystallographic orientation of shape memory thin films and thus suggest promising characteristics, especially in regard to their superelastic behavior.