The success of in-situ transmission electron microscopy experimentation is often dictated by proper speciment preparation. We report here a novel technique permitting the production of cross-sectioned tensile specimens of multilayered films for in-situ deformation studies. Of primary importance in the development of this technique is the production of an electron transparent micro-gauge section using focused ion beam trechnology. This micro-gauge section predetermines the position at w hich plastic defromation is initiated; crack nucleation, growth and failure are then subsequently observed.
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