Fabrication of Micro-Optical Devices by Holographic Interference of High Photosensitive Inorganic-Organic Hybrid Materials (Photo-HYBIRMER)

摘要

Sol-gel derived photosensitive inorganic-organic hybrid materials (Photo-HYBRIMER) containing a large quantity of photoactive molecules exhibit the large changes in both refractive index (over 10~(-2)) and volume (over 30%) on UV exposure. The materials could be used for direct fabrication of micro-optical devices using holographic interference. With the change of the beam number for holographic interference (1-beam, 2-beam, 3-beam and 4-beam interference), various typed micro-optical devices (Fresnel-type lens, 1D- and 2D-typed diffraction gratings) could be easily fabricated. Importantly, the fabricated micro-optical devices exhibited the very homogeneous surface structures and good optical performance.