首页> 外文会议>Symposium Proceedings vol.830; Symposium on Materials and Processes for Nonvolatile Memories; 20041130-1202; Boston,MA(US) >Perfectly c-axis oriented epitaxial lead titanate thin film deposited by a hydrothermal method for a data storage medium
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Perfectly c-axis oriented epitaxial lead titanate thin film deposited by a hydrothermal method for a data storage medium

机译:通过水热法沉积完全c轴取向的外延钛酸铅薄膜作为数据存储介质

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摘要

A hydrothermal method is a unique method to deposit ferroelectric thin films utilizing chemical reaction in solutions. In addition to the low reaction temperature below 200℃, its simple process procedure, automatically aligned polarization and a three-dimensional deposition are advantages. In this study, a lead titanate epitaxial thin film was obtained on a strontium ruthenate bottom electrode sputterd on strontium titanate (100). The high-resolution X-ray diffraction mapping showed the film was perfectly c-axis oriented. The transmission electron microscope observation revealed that the film had no lattice dislocation at the interface between lead titanate arid strontium ruthenate. A remanent polarization of 96.5 μC/cm~2 was measured with the single crystal-like DE hysteresis curve. The observation of a scanning nonlinear dielectric microscopy indicated that this film did not contain any defect such as an a-domain and a grain boundary even on the nano scale. With various pulse parameters, nano-domain dots were patterned and the minimum dot radius of inverted domain was 12 nm corresponding to data storage density of 1Tbit/inch~2.
机译:水热法是利用溶液中的化学反应来沉积铁电薄膜的独特方法。除了低于200℃的低反应温度外,其简单的工艺流程,自动对准的极化和三维沉积等优点。在这项研究中,在溅射在钛酸锶上的钌酸锶底部电极上获得了钛酸铅外延薄膜(100)。高分辨率X射线衍射图谱显示该薄膜是完美的c轴取向。透射电子显微镜观察表明,该膜在钛酸铅和钌酸锶之间的界面处没有晶格位错。用单晶状DE磁滞曲线测得剩余极化为96.5μC/ cm〜2。扫描非线性介电显微镜的观察表明,该膜甚至在纳米尺度上也没有任何缺陷,例如a-畴和晶界。在各种脉冲参数下,对纳米域点进行构图,反向域的最小点半径为12 nm,对应的数据存储密度为1Tbit / inch〜2。

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