Nanofabrication at Biologically Important Length Scale: Etching of Dislocation Array in Twist-bonded Bicrystals

摘要

A process to fabricate a periodic surface structure at biologically important length scale is developed and nanostructured silicon surface with a periodicity of 38 nm has been obtained. The technique relies on controlled etching of a dislocation array in the twist boundaries formed by silicon bicrystals. The deviation from a perfect periodic structure and the method to improve the perfection have been investigated.