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Plasmons on luminescent porous silicon prepared with ethanol and critical point drying

机译:用乙醇和临界点干燥制备的发光多孔硅上的等离子体

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We investigated the plasmon characteristics on luminescent porous silicon using electron energy loss spectroscopy. The samples were prepared from p-type crystalline silicon, (100) face, using the conventional electrochemical etching technique with the usual solution of HF, ethanol and water, followed by a critical point drying process. The energy of the bulk plasmon was measured both before and after sputter cleaning the sample with argon-ion bombardment. We found that initially the plasmon energy was slightly higher, approx 18 eV, that the plasmon energy of crystalline silicon. After sputter cleaning the sample with 5 keV Ar~+ ions, the plasmon energy increased to approx 20 eV. Exposure to the electron beam used for the measurements caused a slow upward shift of the plasmon energy as a function of time, toward a saturation energy of 22-23 eV, an energy close to the plasmon energy of SiC. Auger spectroscopy performed in parallel showed an increasing carbon coverage. We prepared also samples without ethanol in the etching solution and/or with no critical point drying. Samples that did not undergo the critical point drying process showed consistently a practically constant plasmon energy, with almost no change upon sputtering and/or exposure to the electron beam. On the other hand, samples that were prepared with or without ethanol but using the critical point drying process, showed an appreciable increase in the plasmon energy upon exposure to the electron beam.
机译:我们使用电子能量损失谱研究了发光多孔硅上的等离激元特性。使用常规的电化学蚀刻技术,使用HF,乙醇和水的常用溶液,从p型晶体硅(100)面制备样品,然后进行临界点干燥工艺。在用氩离子轰击溅射清洗样品之前和之后,测量本体等离子体激元的能量。我们发现,最初的等离激元能量略高于晶体硅的等离激元能量,约为18 eV。用5 keV Ar〜+离子溅射清洗样品后,等离子体激元能量增加到约20 eV。暴露于用于测量的电子束会导致等离激元能量随时间缓慢向上移动,向22-23 eV的饱和能量(接近SiC的等离激元能量)转移。平行进行的俄歇光谱分析显示碳覆盖率增加。我们还制备了在蚀刻溶液中没有乙醇和/或没有临界点干燥的样品。未经历临界点干燥过程的样品始终显示出几乎恒定的等离激元能量,在溅射和/或暴露于电子束后几乎没有变化。另一方面,在有或没有乙醇但使用临界点干燥工艺制备的样品中,暴露于电子束后,其等离子体激元能量明显增加。

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