The performance of the pre pump ETC DryScrub system was assessed for the capture and the recovery of tungsten from the exhaust stream of a W-CVD tool. It was found that using the plasma scrubber did not affect the upstream W-deposition process. By using a mass spectrometer, the WF_6-destruction efficiency of the scrubber has been determined as function of the following parameters : pressure, electrode material, dissipated power in the plasma, gas composition and electrode orientation. It was found that under the conditions determined by the upstream CVD process the DryScrub system is able to destroy 96percent of the WF_6.
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