Abstract: The spatial frequency response, height sensitivity and system noise of a scanning common-path interferometer have been studied. The impulse response function and the frequency transfer function of the system are obtained analytically using Fresnel diffraction integral. Experimental results are also given. The results show that the system covers a broad spatial frequency range from 2 $MUL 10$+$MIN@5$//micrometer to 3/micrometer. The height sensitivity of the system is better than 0.01 angstrom. System stationary noise less than 0.1 angstrom RMS is achievable without additional noise reduction post-process. Measurement of an ultra-smooth silicon substrate with a sub-angstrom roughness is successfully demonstrated. Measurement of a smooth glass substrate is also shown. !16
展开▼
机译：摘要：研究了扫描共路干涉仪的空间频率响应，高度灵敏度和系统噪声。使用菲涅耳衍射积分解析地获得系统的脉冲响应函数和频率传递函数。还给出了实验结果。结果表明，该系统覆盖的空间频率范围很广，从2 $ MUL 10 $ + $ MIN @ 5 $ //微米到3 /微米。该系统的高度灵敏度优于0.01埃。无需额外的降噪后处理即可实现小于0.1埃RMS的系统静态噪声。成功证明了具有亚埃粗糙度的超光滑硅衬底的测量。还显示了对光滑玻璃基板的测量。 ！16
展开▼
