Abstract: The microtopography of a certain surface is a complicated structure varying across the complete surface. Every surface has different elements of microstructure. In this paper, we consider roughness as a fine structure and defects as large structure elements. Roughness measurement on BK7-glass and CaF$-2$/ samples is considered using different techniques. The comparison includes the automatic scatterometer STREUIX 2 and a TIS-measurement system, the ZYGO microprofilometer MAXIM $DOT 3D, and the NANO SCOPE III of Digital Instruments. For the investigation of scattering characteristics of different surface defects, a special measuring device was developed. The scattered light distribution of different defects and contaminations measured with this set-up is discussed. !19
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