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Organic and inorganic resists for recording of combined optical/digital security devices

机译:有机和无机抗蚀剂,用于记录组合的光学/数字安全设备

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In the present paper the comparative analysis of organic and inorganic resists for registration of optical/digitalholograms is described. The purpose of researches - to find optimum recording medium for record of the combinedholographic protective elements. Organic photoresist S1800®, organic PMMA electron-resist and inorganic resist -Chalcogenide Glass System (HGS) As40S60-xSex (where x=20,30,40) were investigated. Besides this, informationcharacteristics resist layers of HGS were investigated with the purpose of definition optimal recording modes of opticalmicrostructures by Electron Beam Printing System (EBPS). The correcting method of system response on forming ofinteractive diffraction grating is offered. It is shown, that maximal electron sensitivity have resist layers As40S40Se20. Itwas revealed during researches, that for this task an organic resist S1800® series and inorganic - As40S40Se20 are suitable.On results of our measurements it has been established that organic resist S1800® is more sensitive (more than 10 times)in comparsion with HGS and provides higher resolution (about 2500 lines per millimeter). Providing of high resolutionis very important for registering Computer Generated Holograms (CGH), especially 3-D images holograms.
机译:在本文中,描述了用于光学/数字全息图配准的有机和无机抗蚀剂的对比分析。研究的目的-寻找用于记录组合全息保护元件的最佳记录介质。研究了有机光刻胶S1800®,有机PMMA电子抗蚀剂和无机抗蚀剂-硫族化物玻璃系统(HGS)As40S60-xSex(其中x = 20,30,40)。除此之外,还通过电子束印刷系统(EBPS)研究了HGS的信息特性抗蚀剂层,以定义光学微结构的最佳记录方式。提供了形成交互式衍射光栅时系统响应的校正方法。如图所示,最大的电子灵敏度具有抗蚀剂层As40S40Se20。在研究过程中发现,对于该任务,有机抗蚀剂S1800®系列和无机As40S40Se20是合适的。根据我们的测量结果,已经确定有机抗蚀剂S1800®与HGS和HGS相比更敏感(超过10倍)。提供更高的分辨率(每毫米约2500条线)。提供高分辨率对于配准计算机生成的全息图(CGH),尤其是3D图像全息图非常重要。

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