Dynamic excitation- a noninvasive technique for initiating stiction repair in MEMS

摘要

Commercial applications of micro-electromechanical systems (MEMS) continue to be plagued by reliability issuesencountered during fabrication and operation. One of the most prevalent problems is the adhesion between adjacentcomponents since adhesive forces are known to promote wear and defect-related failures. In extreme circumstances, theadhesion is large enough to prevent separation, a phenomenon commonly referred to as stiction-failure. The objectiveof current work is to determine analytically whether dynamic excitation may be used to repair stiction-failedcantilevers. This is accomplished by relating the structural dynamic response to the de-cohesion of stiction-failedmicro-cantilever beams under various loading conditions.